1 Agreement and Release of All Sample Contracts

Contract
1 Agreement and Release of All • August 11th, 2003 • Electro Scientific Industries Inc • Miscellaneous electrical machinery, equipment & supplies • Oregon

EXHIBIT 10.1 AGREEMENT AND RELEASE OF ALL CLAIMS This Agreement is made and entered into by and between Electro Scientific Industries, Inc. (“the Company”) and Robert E. Belter (“Employee”). This Agreement will confirm that it has been mutually agreed to alter the employment relationship between the Company and Employee. In consideration of the mutual covenants and promises below and valuable consideration, receipt of which is hereby acknowledged, the parties hereby agree as follows: 1. Employee’s full-time employment as Vice President/General Manager-Electronic Component Systems with the Company will terminate effective the close of business September 4, 2001. 2. Employee represents that he has not filed any complaint, claim or action against the Company, its officers, agents or representatives, or against any affiliated companies, with any local, state, or federal court and that he will not do so at any time hereafter. 3. Employee understands and agrees that he has not executed th

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