andRights Agreement • July 30th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
RECITALSRights Agreement • December 4th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
1 EXHIBIT 2.1 AGREEMENT AND PLAN OF MERGERAgreement and Plan of Merger • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
2 - 3 payable at the times and at the rate provided for in the Term Note. Overdue principal of the Term Loan and, to the extent permitted by law, overdue interest shall bear interest at a fluctuating rate per annum which at all times shall be equal to...Micrion Corp /Ma/ • September 26th, 1997 • Special industry machinery, nec • Massachusetts
COMMONWEALTH OF MASSACHUSETTS ) ) SS. COUNTY OF ESSEX )Security Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec
1 Exhibit 10.35 SUPPLEMENTARY SECURITY AGREEMENT SECURITY INTEREST IN GOODS AND CHATTELSSupplementary Security Agreement Security Interest • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec
EXHIBIT BOption Agreement • December 9th, 1998 • Micrion Corp /Ma/ • Special industry machinery, nec • Oregon
INVENTORY, ACCOUNTS RECEIVABLE AND INTANGIBLES SECURITY AGREEMENTReceivable and Intangibles Security Agreement • September 26th, 1997 • Micrion Corp /Ma/ • Special industry machinery, nec • Massachusetts
