Common use of EQUIPMENT RELIABILITY Clause in Contracts

EQUIPMENT RELIABILITY. A. Reliability Demonstration: Seller agrees to use "Reliability Qualification Test" (RQT) plans (SEMI E10 96) to demonstrate, with 80% confidence, that the Equipment's reliability meets or exceeds the performance specification for reliability, based on testing of production systems and/or field data. This will be used to substantiate the claims of Equipment performance for each design. Testing will be performed by Seller on as many machines as required to establish the required confidence. If subsystems are tested individually, the subsystem goals must be apportioned from the systems goal. B. Failure Modes and Effects Analysis: Seller agrees it will complete Failure Modes and Effects Analysis (FMEA) studies on at least three of the most critical subsystems and/or those systems that contain new design concepts. C. Fault Tree Analysis: At least annually, Seller will perform Fault Tree Analysis (FTA) on no fewer than the top three known failure modes associated with each type of Equipment. This will document the largest limiters to the Equipment's reliability, and will be the foundation for developing a comprehensive plan for reducing or eliminating each of the failure modes. D. Continuous Improvement/Upgrades: With all continuous improvement projects and upgrade programs, Seller will: (i) Perform FTA's on the existing problem or issue to verify that the most important root causes are understood and corrective actions are generated. (ii) Model and provide rationale for the design goals for the proposed solution. (iii) Perform FMEA's on the solution design. (iv) Execute an RQT to objectively verify the reliability of the solution.

EQUIPMENT RELIABILITY. A. Reliability Demonstration: Demonstration Seller agrees to use "Reliability Qualification Test" (RQT) plans (SEMI E10 96MIL-HDBK-781) to demonstrate, with 80% confidence, that the Equipment's reliability meets or exceeds the performance specification for reliability, based on testing of production systems and/or field data. This will be used to substantiate the claims of Equipment performance for each design. Testing will be performed by Seller on as many machines as required to establish the required confidence. If subsystems are tested individually, the subsystem goals must be apportioned from the systems goal. B. Failure Modes and Effects Analysis: Analysis Seller agrees it will complete Failure Modes and Effects Analysis (FMEA) studies on at least three of the most critical subsystems and/or those systems that contain new design concepts. C. Fault Tree Analysis: Analysis At least annually, Seller will perform Fault Tree Analysis (FTA) on no fewer than the top three known failure modes associated with each type of Equipment. This will document the largest limiters to the Equipment's reliability, and will be the foundation for developing a comprehensive plan for reducing or eliminating each of the failure modes. D. Continuous Improvement/Upgrades: Upgrades With all continuous improvement projects and upgrade programs, Seller will: (i) Perform FTA's on the existing problem or issue to verify that the most important root causes are understood and corrective actions are generated. (ii) Model and provide rationale for the design goals for the proposed solution. (iii) Perform FMEA's on the solution design. (iv) Execute an RQT to objectively verify the reliability of the solution.

EQUIPMENT RELIABILITY. A. Reliability Demonstration: Demonstration Seller agrees to use "Reliability Qualification Test" (RQT) plans (SEMI E10 96MIL-HDBK-781) to demonstrate, with 80% confidence, that the Equipment's reliability meets or exceeds the performance specification for reliability, based on testing of production systems and/or field data. This will be used to substantiate the claims of Equipment performance for each design. Testing will be performed by Seller on as many machines as required to establish the required confidence. If subsystems are tested individually, the subsystem goals must be apportioned from the systems goal. B. Failure Modes and Effects Analysis: Analysis Seller agrees it will complete Failure Modes and Effects Analysis (FMEA) studies on at least three of the most critical subsystems and/or those systems that contain new design concepts. C. Fault Tree Analysis: Analysis At least annually, Seller will perform Fault Tree Analysis (FTA) on no fewer than the top three known failure modes associated with each type of EquipmentEquipment under warranty. This will document the largest limiters to the Equipment's reliability, and will be the foundation for developing a comprehensive plan for reducing or eliminating each of the failure modes. D. Continuous Improvement/Upgrades: Upgrades With all continuous improvement projects and upgrade programs, Seller will: (i) Perform FTA's on the existing problem or issue to verify that the most important root causes are understood and corrective actions are generated. (ii) Model and provide rationale for the design goals for the proposed solution. (iii) Perform FMEA's on the solution design. (iv) Execute an RQT to objectively verify the reliability of the solution.