0001047469-15-001994 Sample Contracts

LEASE AGREEMENT made as of the 30th day of January, 2015 by and between BEVERLY PROPERTY OWNER LLC as Landlord, and AXCELIS TECHNOLOGIES, INC. as Tenant
Lease Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

THIS LEASE AGREEMENT (this “Lease”) made as of the 30th day of January, 2015, by and between BEVERLY PROPERTY OWNER LLC, a Delaware limited liability company, as landlord, having an office at c/o Middleton Partners, 400 Skokie Boulevard, Northbrook, Illinois 60062, and AXCELIS TECHNOLOGIES, INC., a Delaware corporation, having an office at 108 Cherry Hill Drive, Beverly, Massachusetts 01915.

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SECOND AMENDMENT TO LOAN AND SECURITY AGREEMENT
Loan and Security Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

This Second Amendment to Loan and Security Agreement (this “Amendment”) is entered into as of February 2, 2015, by and between SILICON VALLEY BANK, a California corporation, with its principal place of business at 3003 Tasman Drive, Santa Clara, California 95054 and with a loan production office located at 275 Grove Street, Suite 2-200, Newton, Massachusetts 02466 (“Bank”), and AXCELIS TECHNOLOGIES, INC., a Delaware corporation with offices located at 108 Cherry Hill Drive, Beverly, Massachusetts 01915 (“Borrower”).

AXCELIS TECHNOLOGIES, INC. EXECUTIVE SEPARATION PAY AGREEMENT
Executive Separation Pay Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

THIS EXECUTIVE SEPARATION PAY AGREEMENT, dated as of , 2015, is made by and between Axcelis Technologies, Inc. (the “Company”) and (the “Executive”).

SIXTH AMENDMENT TO REAL ESTATE SALE AGREEMENT
Real Estate Sale Agreement • March 11th, 2015 • Axcelis Technologies Inc • Special industry machinery, nec

THIS SIXTH AMENDMENT TO REAL ESTATE SALE AGREEMENT (“Amendment”) is made effective as of January 30, 2015 by and between Middleton Beverly Investors LLC, a Delaware limited liability company, together with its successors and assigns (“Purchaser”) and Axcelis Technologies, Inc. (“Seller”).

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