Beta Source definition
Beta Source means a 50W EUV Source System as defined in the SOW.
Examples of Beta Source in a sentence
Cymer agrees it will make available for shipment a Beta Minus Source to Intel’s selected lithography tool integrator (or Intel, as mutually agreed) by […***…], a Beta Source by […***…], and HVM Source by […***…], with a target date of […***…].
Cymer agrees to review potential plans to accelerate the delivery of the Beta Source.