0001362310-09-002858 Sample Contracts

ULTRATECH, INC. GRANT AGREEMENT
Grant Agreement • February 27th, 2009 • Ultratech Inc • Special industry machinery, nec • California
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ULTRATECH, INC. RESTRICTED STOCK UNIT ISSUANCE AGREEMENT
Ultratech Inc • February 27th, 2009 • Special industry machinery, nec • California
AMENDED AND RESTATED EMPLOYMENT AGREEMENT
Employment Agreement • February 27th, 2009 • Ultratech Inc • Special industry machinery, nec • California

This Amended and Restated Employment Agreement (this “Restated Agreement”) is entered into on October 14, 2008, by and between Arthur W. Zafiropoulo (the “Executive”) and Ultratech, Inc., a Delaware corporation (the “Company”) and, except as otherwise provided herein, shall become effective as of January 1, 2009.

NONQUALIFIED SUPPLEMENTAL DEFERRED COMPENSATION PLAN ADOPTION AGREEMENT
Ultratech Inc • February 27th, 2009 • Special industry machinery, nec

o Adoption — The undersigned Ultratech, Inc. (the “Employer”) hereby adopts as a Nonqualified Deferred Compensation Plan for the individuals identified in Item 5 herein the form of Plan known as the Nonqualified Supplemental Deferred Compensation Plan.

ULTRATECH, INC. GRANT AGREEMENT
Employment Agreement • February 27th, 2009 • Ultratech Inc • Special industry machinery, nec • California
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