0001193125-12-139191 Sample Contracts

FSI INTERNATIONAL, INC. (As Amended and Restated January 2012) Restricted Stock Award Agreement
Restricted Stock Award Agreement • March 29th, 2012 • Fsi International Inc • Special industry machinery, nec • Minnesota

FSI International, Inc. (the “Company”), pursuant to Section 7 of its 2008 Omnibus Incentive Plan (as amended and restated January 2012) (the “Plan”), hereby grants an award of Restricted Stock to you, the Participant named below. The terms and conditions of this restricted stock Award are set forth in this Restricted Stock Award Agreement (the “Agreement”), consisting of this cover page and the Terms and Conditions on the following pages, and in the Plan document which is attached. To the extent any capitalized term used in this Agreement is not defined, it shall have the meaning assigned to it in the Plan as it currently exists or as it is amended in the future.

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FSI INTERNATIONAL, INC. (As Amended and Restated January 2012) STOCK OPTION AGREEMENT FOR NON-EMPLOYEE DIRECTOR
Stock Option Agreement for Non • March 29th, 2012 • Fsi International Inc • Special industry machinery, nec • Minnesota

FSI International, Inc. (the “Company”), pursuant to Section 9.3 of its 2008 Omnibus Incentive Plan (as amended and restated January 2012) (the “Plan”), hereby grants to the Non-Employee Director named below (“Optionee”) an Option to purchase the number of shares of the Company’s common stock shown below. The terms and conditions of this Option Award are set forth in this Stock Option Agreement (the “Agreement”), consisting of Option Award Table below and the Terms and Conditions on the following pages, and in the Plan document which will either be provided with the Company letter advising you of the grant or will be accessible on the Solium Capital (The “Third Party”) plan administrators web site under the subheading “Shareworks”. To the extent any capitalized term used in this Agreement is not defined, it shall have the meaning assigned to it in the Plan as it currently exists or as it is amended in the future.

FSI INTERNATIONAL, INC. (As Amended and Restated January 2012) NON-STATUTORY STOCK OPTION AGREEMENT
Non-Statutory Stock Option Agreement • March 29th, 2012 • Fsi International Inc • Special industry machinery, nec • Minnesota

FSI International, Inc. (the “Company”), pursuant to Section 9 of its 2008 Omnibus Incentive Plan (as amended and restated January 2012) (the “Plan”), hereby grants to the Optionee named below an Option to purchase the number of shares of the Company’s common stock shown below. The terms and conditions of this Option Award are set forth in this Non-Statutory Stock Option Agreement (the “Agreement”), consisting of the Option Award Table and the Terms and Conditions on the following pages, and in the Plan document which will either be provided with the Company letter advising you of the grant or will be accessible on the Solium Capital (the “Third Party”) plan administrators web site under the subheading “Shareworks”. To the extent any capitalized term used in this Agreement is not defined, it shall have the meaning assigned to it in the Plan as it currently exists or as it is amended in the future.

FSI INTERNATIONAL, INC. (As Amended and Restated January 2012) INCENTIVE STOCK OPTION AGREEMENT
Incentive Stock Option Agreement • March 29th, 2012 • Fsi International Inc • Special industry machinery, nec • Minnesota

FSI International, Inc. (the “Company”), pursuant to Section 9 of its 2008 Omnibus Incentive Plan (as amended and restated January 2012) (the “Plan”), hereby grants to the Optionee named below an Option to purchase the number of shares of the Company’s common stock shown below. The terms and conditions of this Option Award are set forth in this Incentive Stock Option or Non-Qualified Stock Option Agreement (the “Agreement”), consisting of the Option Award Table below and the Terms and Conditions on the following pages, and in the Plan document which will either be provided with the Company letter advising you of the grant or will be accessible on the Solium Capital (the “Third Party”) plan administrators web site under the subheading “Shareworks”. To the extent any capitalized term used in this Agreement is not defined, it shall have the meaning assigned to it in the Plan as it currently exists or as it is amended in the future.

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