0001193125-05-138979 Sample Contracts

FORM OF COMPANY SHAREHOLDER VOTING AGREEMENT Company Shareholder Voting Agreement
Company Shareholder Voting Agreement • July 7th, 2005 • Rudolph Technologies Inc • Industrial instruments for measurement, display, and control • Delaware

THIS COMPANY SHAREHOLDER VOTING AGREEMENT (this “Agreement”) is entered into as of June 27, 2005, by and between Rudolph Technologies, Inc., a Delaware corporation (“Parent”), NS Merger Sub, Inc., a Minnesota corporation and a wholly owned subsidiary of Parent (“Merger Sub”) and the undersigned shareholder (the “Shareholder”) of August Technology Corporation, a Minnesota corporation (the “Company”).

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AGREEMENT AND PLAN OF MERGER by and among RUDOLPH TECHNOLOGIES, INC., NS MERGER SUB, INC., and AUGUST TECHNOLOGY CORPORATION Dated as of June 27, 2005
Agreement and Plan of Merger • July 7th, 2005 • Rudolph Technologies Inc • Industrial instruments for measurement, display, and control • Delaware

THIS AGREEMENT AND PLAN OF MERGER is entered into as of June 27, 2005 (this “Agreement”) by and among Rudolph Technologies, Inc., a Delaware corporation (“Parent”), NS Merger Sub, Inc., a Minnesota corporation and a wholly owned subsidiary of Parent (“Merger Sub”), and August Technology Corporation, a Minnesota corporation (the “Company”).

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