0001144204-06-045859 Sample Contracts

THE EIGHTH AMENDED AND RESTATED 1998 EQUITY PARTICIPATION PLAN OF TEGAL CORPORATION RESTRICTED STOCK UNIT AWARD GRANT NOTICE AND RESTRICTED STOCK UNIT AWARD AGREEMENT
Restricted Stock Unit Award Agreement • November 8th, 2006 • Tegal Corp /De/ • Special industry machinery, nec • Delaware

Tegal Corporation (the “Company”), pursuant to The Eighth Amended and Restated 1998 Equity Participation Plan of Tegal Corporation (the “Plan”), hereby grants to the holder listed below (“Holder”), the number of Restricted Stock Units set forth below (the “Restricted Stock Units”). The Restricted Stock Units are subject to all of the terms and conditions as set forth herein and in the Restricted Stock Unit Award Agreement attached hereto as Exhibit A (the “Restricted Stock Unit Agreement”) and the Plan, each of which are incorporated herein by reference. Unless otherwise defined herein, the terms defined in the Plan shall have the same defined meanings in this Grant Notice and the Restricted Stock Unit Agreement.

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FORM OF NON-QUALIFIED STOCK OPTION AGREEMENT (EMPLOYEES)
Non-Qualified Stock Option Agreement • November 8th, 2006 • Tegal Corp /De/ • Special industry machinery, nec • California

THIS AGREEMENT, dated __________, is made by and between Tegal Corporation, a Delaware corporation hereinafter referred to as “Company,” and ________, an employee of the Company or a Subsidiary of the Company, hereinafter referred to as “Employee”:

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