0001104659-12-055070 Sample Contracts

CHANGE OF CONTROL AGREEMENT
Change of Control Agreement • August 7th, 2012 • Axcelis Technologies Inc • Special industry machinery, nec • Massachusetts

AGREEMENT by and between AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the “Company”), and (the “Executive”), dated as of the day of , 20 .

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RESTRICTED STOCK UNIT AWARD AGREEMENT UNDER AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN
Restricted Stock Unit Award Agreement • August 7th, 2012 • Axcelis Technologies Inc • Special industry machinery, nec • Delaware
Sample 1
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