0001104659-10-031266 Sample Contracts

FIRST LOAN MODIFICATION AGREEMENT
First Loan Modification Agreement • May 27th, 2010 • Axcelis Technologies Inc • Special industry machinery, nec

This First Loan Modification Agreement (this “Loan Modification Agreement”) is entered into as of May 25, 2010, by and between SILICON VALLEY BANK, a California corporation, with its principal place of business at 3003 Tasman Drive, Santa Clara, California 95054 and with a loan production office located at One Newton Executive Park, Suite 200, 2221 Washington Street, Newton, Massachusetts 02462 (“Bank”), and AXCELIS TECHNOLOGIES, INC. (“ATI”) and AXCELIS TECHNOLOGIES CCS CORPORATION, each a Delaware corporation with offices located at 108 Cherry Hill Drive, Beverly, Massachusetts 01915 (individually and collectively, jointly and severally “Borrower”).

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