0001104659-05-031556 Sample Contracts

AGREEMENT AND PLAN OF MERGER
Agreement and Plan of Merger • July 7th, 2005 • August Technology Corp • Optical instruments & lenses • Delaware

THIS AGREEMENT AND PLAN OF MERGER is entered into as of June 27, 2005 (this “Agreement”) by and among Rudolph Technologies, Inc., a Delaware corporation (“Parent”), NS Merger Sub, Inc., a Minnesota corporation and a wholly owned subsidiary of Parent (“Merger Sub”), and August Technology Corporation, a Minnesota corporation (the “Company”).

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PARENT STOCKHOLDER VOTING AGREEMENT
Parent Stockholder Voting Agreement • July 7th, 2005 • August Technology Corp • Optical instruments & lenses • Delaware

This PARENT STOCKHOLDER VOTING AGREEMENT (this “Agreement”) is entered into as of June 27, 2005, by and between August Technology Corporation, a Minnesota corporation (the “Company”), and the undersigned stockholder (the “Stockholder”) of Rudolph Technologies, Inc., a Delaware corporation (“Parent”).

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