0001101302-15-000002 Sample Contracts

ENTEGRIS, INC.
Stock Option Award Agreement • February 26th, 2015 • Entegris Inc • Plastics products, nec

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of stock options with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a stock option award (the “Award”) is notified in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Accounts Summary page (“My Grants” section under the Stock Options Plan tab) for Entegris equity awards on the Morgan Stanley Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the Participant’s Award Summary page or by otherwise receiving the benefits of the Award, Participant: (i) acknowledges that P

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ENTEGRIS, INC.
Rsu Unit Award Agreement • February 26th, 2015 • Entegris Inc • Plastics products, nec

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of restricted stock units with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a ”Participant”) who receives a restricted stock unit award (the “Award”) is notified either in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Account Summary page (“My Awards” section under the Restricted Stock Plan tab) for Entegris equity awards on the Morgan Stanley Smith Barney Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the My Awards tab on your Restricted Stock Plan page or by otherwise receiving the ben

ENTEGRIS, INC.
Stock Option Grant Agreement • February 26th, 2015 • Entegris Inc • Plastics products, nec

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive grants consisting of stock options with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a “Participant”) who receives a stock option grant (the “Grant”) is notified in writing or via email and the Grant is credited to the Participant’s account as reflected on the Participant’s Accounts Summary page (“My Grants” section under the Stock Options Plan tab) for Entegris equity awards on the Morgan Stanley Smith Barney Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept grant” button on the My Grants tab on your Stock Option Plan page or by otherwise receiving the benefits of the Grant, Participant

ENTEGRIS, INC.
2014 Rsu Award Agreement • February 26th, 2015 • Entegris Inc • Plastics products, nec

In consideration of services rendered to Entegris, Inc. (the “Company”), the Company periodically makes equity incentive awards consisting of restricted stock units with respect to the Company’s Common Stock $0.01 par value (“Stock”) to certain key employees, non-employee directors, consultants or advisors of the Company under the Company’s 2010 Stock Plan or a predecessor plan (the “Plan”). Any key employee, non-employee director, consultant or advisor (a ”Participant”) who receives a restricted stock unit award (the “Award”) is notified either in writing or via email and the Award is credited to the Participant’s account as reflected on the Participant’s Account Summary page (“My Awards” section under the Restricted Stock Plan tab) for Entegris equity awards on the Morgan Stanley Benefit Access web page found at https://www.benefitaccess.com. By clicking on the “accept award” button on the My Awards tab on the Restricted Stock Plan page or by otherwise receiving the benefits of the A

November 13, 2014 Delivered in Person Mr. Gregory Morris 22330 Wybenga Lane Nuevo, CA 92567 Dear Greg:
Letter Agreement • February 26th, 2015 • Entegris Inc • Plastics products, nec

The purpose of this letter agreement (“Agreement”) is to set forth the severance compensation and benefits being offered to you and to specify the other severance arrangements as the result of the termination of your employment with Entegris, Inc. (the “Company”).

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