0000950134-07-000222 Sample Contracts

AGREEMENT AND PLAN OF MERGER dated as of January 7, 2007 among KLA-TENCOR CORPORATION, FENWAY ACQUISITION CORPORATION and THERMA-WAVE, INC.
Agreement and Plan of Merger • January 8th, 2007 • Therma Wave Inc • Industrial instruments for measurement, display, and control • Delaware

AGREEMENT AND PLAN OF MERGER (this “Agreement”) dated as of January 7, 2007, among KLA-Tencor Corporation, a Delaware corporation (“Parent”), Fenway Acquisition Corporation, a Delaware corporation and a wholly-owned subsidiary of Parent (“Merger Subsidiary”), and Therma-Wave, Inc., a Delaware corporation (the “Company”).

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TENDER AND SUPPORT AGREEMENT
Tender and Support Agreement • January 8th, 2007 • Therma Wave Inc • Industrial instruments for measurement, display, and control • Delaware

TENDER AND SUPPORT AGREEMENT (this “Agreement”) dated as of January 7, 2007 between KLA Tencor Corporation, a Delaware corporation (“Parent”), Fenway Acquisition Corporation, a Delaware corporation and wholly-owned subsidiary of Parent (“Merger Subsidiary”), Therma-Wave, Inc., a Delaware corporation (the “Company”), and the parties listed on Annex I and Annex II (each, a “Securityholder”), each an owner of the Company Shares, Series B Convertible Preferred Stock and/or Series B Warrants of the Company.

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