FSI INTERNATIONAL, INC. 1997 OMNIBUS STOCK PLAN Stock Option Agreement for [Initial/Annual] Outside Director OptionDirector Stock Option Agreement • October 20th, 2004 • Fsi International Inc • Special industry machinery, nec • Minnesota
Contract Type FiledOctober 20th, 2004 Company Industry JurisdictionThis is an [INITIAL/ANNUAL] OUTSIDE DIRECTOR STOCK OPTION AGREEMENT between FSI International, Inc., a Minnesota corporation (the “Company”), and the Outside Director of the Company listed above (the “Optionee”).
FSI INTERNATIONAL, INC. 1997 OMNIBUS STOCK PLAN INCENTIVE STOCK OPTION AGREEMENTIncentive Stock Option Agreement • October 20th, 2004 • Fsi International Inc • Special industry machinery, nec • Minnesota
Contract Type FiledOctober 20th, 2004 Company Industry JurisdictionThis is an INCENTIVE STOCK OPTION AGREEMENT (“Agreement”) between FSI International, Inc., a Minnesota corporation (the “Company”), and the Optionee identified above (the “Optionee”) effective as of the date of grant specified above.