EXHIBIT 10.28Source Technology License Agreement • April 8th, 1998 • Trikon Technologies Inc • Special industry machinery, nec • California
Contract Type FiledApril 8th, 1998 Company Industry Jurisdiction
AMENDMENT NO. 1 TO PARTNERSHIP INTEREST AND SHARE PURCHASE AGREEMENTInterest and Share Purchase Agreement • April 8th, 1998 • Trikon Technologies Inc • Special industry machinery, nec • California
Contract Type FiledApril 8th, 1998 Company Industry Jurisdiction