LICENSE TO SOURCE CODE. Subject to the terms and conditions of this Agreement, Eaton hereby grants to Axcelis, under Eato▇'▇ ▇▇▇ellectual property rights in and to the Software, a nonexclusive, nontransferable worldwide license (i) to use and reproduce (for archival and back-up purposes only), for the sole purpose of supporting the object code version of the Software (if such object code exists), or, if no object code exists, for the sole purpose of its own internal information processing services and computing needs and (ii) to use Source Code Documentation in connection with the permitted use of the Source Code and to make copies for archival and back-up purposes only.
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Sources: Transitional Services Agreement (Axcelis Technologies Inc), Transitional Services Agreement (Axcelis Technologies Inc)